Amtech's Solar Diffusion System is Selected by Two Prominent Solar Research Institutes

Shipments Reflect Growing Technology Validation

• Press Release
• Source: Amtech Systems, Inc.
• On 6:30 am EDT, Tuesday October 20, 2009

TEMPE, Ariz.--(BUSINESS WIRE)--Amtech Systems, Inc. (NASDAQ:ASYS - News), a global supplier of production and automation systems and related supplies for the manufacture of solar cells, semiconductors, and silicon wafers, today announced that its solar subsidiary, Tempress Systems, Inc., has shipped one of its market-leading diffusion furnace systems to a prominent solar research institute located in Asia. A second diffusion system is scheduled to ship in the March quarter to a leading solar research institute in Australia. These orders were received in fiscal 2009.

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Symbol	Price	Change
ASYS	6.20	+0.07

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J.S. Whang, President and Chief Executive Officer of Amtech, commented, “We are pleased to see such strong interest in our solar products from these prominent solar research institutes and believe these orders validate our growing technology expertise in the front-end manufacturing of solar cells. The race to higher solar-cell conversion efficiency is intense and we believe we are well positioned to support our customers in achieving higher efficiencies and becoming a technology turnkey product supplier to the diffusion, PSG, and PECVD markets.”

About Amtech Systems, Inc.

Amtech Systems, Inc. manufactures capital equipment, including silicon wafer handling automation, thermal processing equipment and related consumables used in fabricating solar cells and semiconductor devices. Semiconductors, or semiconductor chips, are fabricated on silicon wafer substrates, sliced from ingots, and are part of the circuitry, or electronic components, of many products including solar cells, computers, telecommunications devices, automotive products, consumer goods, and industrial automation and control systems. The Company’s wafer handling, thermal processing and consumable products currently address the diffusion, oxidation, deposition, PECVD, and PSG removal steps used in the fabrication of solar cells, semiconductors, MEMS and the polishing of newly sliced silicon wafers.

Statements contained in this press release that are not historical facts may be forward looking statements within the meaning of the Private Litigation Reform Act. Such statements may use words such as “proposed,” "anticipate," "believe," "estimate," "expect," "intend," "predict," "project" and similar expressions as they relate to Amtech Systems, Inc. or our management. When we make forward-looking statements, we are basing them on our management's beliefs and assumptions, using information currently available to us. Although we believe that the expectations reflected in the forward looking statements are reasonable, these forward-looking statements are subject to risks, uncertainties and assumptions including the risks discussed in our filings with the Securities and Exchange Commission. If one or more of these risks materialize, or if our underlying assumptions prove to be incorrect, actual results may vary materially from what we projected. Any forward looking statements contained in this press release reflect our current views with respect to future events and are subject to these and other risks, uncertainties and assumptions relating to our operations, results of operations, growth strategy and liquidity. We have no intention, and disclaim any obligation, to update or revise any forward-looking statements, whether as a result of new information, future results or otherwise.

Amtech Systems, Inc
Bradley C. Anderson, 480-967-5146
Chief Financial Officer
or
MKR Group, Inc.
Todd Kehrli or Jim Byers, 323-468-2300
Investor Relations
asys@mkr-group.com