Entegris Adds Asymmetric Nylon to Its Family of Impact(r) and Microgard(r) Photochemical Filters

10nm Advanced Nylon Membrane Technology Offers Two Times Comparable Flow Rates

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CHASKA, Minn., Feb. 23, 2009 (GLOBE NEWSWIRE) -- Entegris, Inc. (NasdaqGS:ENTG - News) set a new standard in semiconductor photochemical filtration with the introduction of the first 10-nanometer nylon filter to optimize both retention and flow. At twice the flow and thickness of comparable nylon filters, the new asymmetric nylon membrane enables improved gel retention and industry-leading flow performance to reduce wafer defects in the most advanced photolithography applications,

``This innovation clearly represents Entegris' leadership in materials science,'' said Walter Plante, Marketing Director for Entegris' Liquid Microcontamination Control Business Unit. ``Our new nylon filter overcomes what had previously been a technological limitation -- optimized flow and retention without the risk of defectivity or reduced throughput resulting from increased pressure drop. This offers significant benefits to our semiconductor customers who want to assure the purity of their process and quality of the final product. It also further delivers on Entegris' commitment to provide leading-edge membrane and filtration technologies for enhanced contamination control.''

The new nylon membrane, which is available in the Impact point-of-use filter and the Microgard(r) product for bulk applications, expands Entegris' solution set for a wide range of chemistries and applications. With the unique combination of its two-stage IntelliGen(r) Mini pump and advanced filtration products, Entegris provides the industry with standard-setting performance in the delivery and filtration of photochemicals and coatings in 45-nanometer and below processes.

About Entegris

Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, India, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at http://www.entegris.com.

Entegris and Impact are registered trademarks of Entegris, Inc.

          Entegris, Inc.
          Steve Cantor, VP of Corporate Relations
          978-436-6750
          irelations@entegris.com