FSI International Receives Follow-on Order for FSI ORION® Single Wafer Cleaning Technology from Major U.S. Based Semiconductor Manufacturer

This system will be integrated into the fabrication of 32nm BEOL copper/low-k interconnects and be used in 22nm development activities

• Press Release
• Source: FSI International, Inc.
• On 8:00 am EDT, Wednesday October 7, 2009

MINNEAPOLIS--(BUSINESS WIRE)--FSI International, Inc. (Nasdaq: FSII - News) a leading supplier of wafer processing, cleaning and surface conditioning equipment for semiconductor manufacturing, announced today the receipt of a repeat order for the FSI ORION^® single wafer cleaning technology from a major U.S. based semiconductor manufacturer. The eight process chamber FSI ORION system will be integrated into the fabrication of 32nm BEOL copper/low-k interconnects and for 22nm development activities. The system is expected to ship prior to calendar 2009 year end. The FSI ORION system sells for $2.5 to $6.0 million, depending on the number of process chambers, chemical flows and its applications configuration.

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“This repeat order is especially important to us as it validates the extendibility of our FSI ORION technology for both 45nm and 32nm BEOL manufacturing and 22nm BEOL development,” said Don Mitchell, FSI’s president and CEO. “Concurrently, a major Korean customer is evaluating the FSI ORION system for FEOL applications, including our patented ViPR™+ technology that is being utilized to remove highly implanted photoresist with a unique one-step process,” continued Mitchell.

The FSI ORION system’s unique closed-chamber design addresses critical path cleaning issues for both FEOL and BEOL advanced manufacturing processes. For more information on the FSI ORION system, visit the FSI web site at http://www.fsi-intl.com/index.php/index.php/applications-and-products/orion-single-wafer-cleaning-cluster.

FSI International, Inc. is a global supplier of surface conditioning equipment, technology and support services for microelectronics manufacturing. Using the company’s broad portfolio of cleaning products, which include batch and single-wafer platforms for Immersion, Spray, Vapor and CryoKinetic technologies, customers are able to achieve their process performance flexibility and productivity goals. The company’s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment. For more information, visit FSI’s website at http://www.fsi-intl.com.

FSI International, Inc.
Financial Media and Investors
Benno Sand, 952-448-8936
benno.sand@fsi-intl.com