Major Asian Foundry Selects Axcelis for High Energy Implant Multiple Tool Order

Axcelis Continues to Strengthen High Energy Leadership Position

• Press Release
• Source: Axcelis Technologies, Inc.
• On 8:30 am EDT, Monday September 21, 2009

BEVERLY, Mass., Sept. 21, 2009 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS - News), a leading supplier of innovative, high-productivity solutions for the semiconductor industry, announced today that it has received a multiple system order for its industry leading high energy ion implanter from a major foundry in Asia. The tools will be used for high volume manufacturing of logic and memory products, as well as for the development of next generation devices.

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Mary Puma, chairman and CEO, commented, "We have a strong relationship with this customer because of the strength of our high energy implant technology and our exceptional customer service. The sale complements the suite of Axcelis implanters already installed at the foundry, and demonstrates the preference of leading device makers for Axcelis' high energy products." She added, "These orders follow several additional high energy purchases from three major chipmakers based in the region, further solidifying our lead in this implant segment."

Axcelis is the industry's foremost supplier of high energy ion implant systems, with the world's largest installed base and leading market share. It offers the most comprehensive product offering in high energy, with the broadest product suite and a complete range of energy levels for both single and multi wafer requirements. Most recently, the company introduced the Optima XE, extending its high energy market strength. The Optima XE combines Axcelis' production-proven RF Linac high energy, spot beam technology with a high-speed, state-of-the-art single wafer endstation, enabling unmatched productivity. Its inherent flexibility and broad energy range of 10keV to 4.5MeV allow a single tool to support chipmakers' dynamic high energy requirements for DRAM, NAND and NOR FLASH, embedded memory, image sensor and logic device manufacturing.

Axcelis Technologies, Inc. (Nasdaq:ACLS - News) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.

Axcelis Technologies, Inc.
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Maureen Hart 
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Stephen Bassett 
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