Axcelis receives multiple system order for the Purion XE single wafer

theflyonthewall.com

Axcelis Technologies announced that it has received a multiple system order for the Company's new Purion XE single wafer, high energy implanter. The Purion XE, which is the process tool of record for this customer's high energy requirements, will be installed as part of a capacity expansion at a fab in the Asia Pacific Region, and will be used in high volume production of advanced NAND devices. The systems ship in Q1.

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