ANDOVER, Mass. (AP) -- MKS Instruments Inc. on Tuesday increased its quarterly dividend by 7 percent to 16 cents per share, saying it was confident in its ability to cash flow levels.
The board approved the increase from the prior 15 cents. The new rate is to be paid Sept. 14 to shareholders of record as of Aug. 31.
MKS, based in Andover, Mass., makes equipment used in manufacturing semiconductors, flat-panel displays, solar cells, light-emitting diodes and data storage products.
Shares rose 29 cents, or 1.1 percent, to $26.62 in late trading.