Almere, The Netherlands
8 July, 2019, 3 p.m. CET
ASM INTERNATIONAL EXPANDS TECHNOLOGY OFFERINGS WITH INTEGRATED SURFACE CLEAN PROCESS MODULE
Enhances Performance and Productivity of ASM’s Intrepid ES Epitaxy Platform
San Francisco, California – ASM International N.V. (Euronext Amsterdam: ASM) today introduced its Previum® process module for 300mm integrated pre-deposition surface cleaning, which significantly improves the performance of deposited films.
Integrated into ASM’s production-proven Intrepid ES epitaxy platform, Previum surface cleaning enables optimal quality epitaxial depositions for advanced node channel and source/drain engineering applications. Intrepid ES systems integrated with Previum modules are already in production at a leading foundry for advanced-node CMOS transistor Epi applications.
“Previum delivers critical process capabilities to achieve high-quality epitaxy films at 5nm and smaller devices,” said Dr. Hichem M’Saad, ASM General Manager and Senior Vice President, Thermal Products Business Unit. “While the integrated surface clean process capability delivers a strong performance benefit, it also delivers on critical HVM requirements with high throughput, low defectivity, and excellent removal uniformity.”
Previum has demonstrated excellent surface clean performance for interfacial oxide removal to create a pristine silicon surface for defect-free epitaxy film deposition. Additionally it has the capability to perform removal of both interfacial oxygen and carbon in the same chamber with a single recipe – a significant HVM productivity advantage for advanced-node CMOS processing.
About ASM International
ASM International NV, headquartered in Almere, the Netherlands, its subsidiaries and participations design and manufacture equipment and materials used to produce semiconductor devices. ASM International, its subsidiaries and participations provide production solutions for wafer processing (Front-end segment) as well as for assembly & packaging and surface mount technology (Back-end segment) through facilities in the United States, Europe, Japan and Asia. ASM International's common stock trades on the Euronext Amsterdam Stock Exchange (symbol ASM). For more information, visit ASMI's website at www.asm.com.
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