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Zygo receives large orders for advanced systems, components

Zygo announced that it has received multiple orders for advanced metrology systems and optical components in support of 450 mm wafer systems development for OEM semiconductor equipment suppliers. Confidentiality agreements do not permit disclosure of customer information or amounts and specific nature of the products, but the aggregate of these orders has driven the company's backlog to $88.9M as of March 31, - near record levels for Zygo Corporation. These orders will begin to ship during the first part of FY14. The orders include advanced large aperture interferometer systems to support 450 mm wafer chuck and stage manufacturing by OEM suppliers, stage position sensing systems and OEM optical components for next generation semiconductor fabrication equipment.