ACLS - Axcelis Technologies, Inc.

NasdaqGS - NasdaqGS Real Time Price. Currency in USD

Axcelis Technologies, Inc.

108 Cherry Hill Drive
Beverly, MA 01915-1088
United States
978 787 4000

IndustrySemiconductor Equipment & Materials
Full Time Employees1,388

Key Executives

NameTitlePayExercisedYear Born
Ms. Mary G. PumaExec. Chairperson1.79MN/A1958
Dr. Russell J. Low Ph.D.CEO, Pres & Director798.55kN/A1971
Mr. Kevin J. BrewerExec. VP & CFO995.68kN/A1959
Ms. Lynnette C. FallonExec. VP of HR & Legal, Gen. Counsel and Corp. Sec.793.66kN/A1960
Mr. Douglas A. LawsonExec. VP of Corp. Marketing & Strategy707.31kN/A1961
Mr. Greg Redinbo Ph.D.Exec. VP of Marketing & ApplicationsN/AN/A1965
Amounts are as of December 31, 2022 and compensation values are for the last fiscal year ending on that date. Pay is salary, bonuses, etc. Exercised is the value of options exercised during the fiscal year. Currency in USD.


Axcelis Technologies, Inc. designs, manufactures, and services ion implantation and other processing equipment used in the fabrication of semiconductor chips in the United States, Europe, and Asia Pacific. The company offers high energy, high current, and medium current implanters for various application requirements. It also provides aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services, and customer training. It sells its equipment and services to semiconductor chip manufacturers through its direct sales force. Axcelis Technologies, Inc. was founded in 1978 and is headquartered in Beverly, Massachusetts.

Corporate Governance

Axcelis Technologies, Inc.’s ISS Governance QualityScore as of June 1, 2023 is 3. The pillar scores are Audit: 2; Board: 3; Shareholder Rights: 6; Compensation: 1.

Corporate governance scores courtesy of Institutional Shareholder Services (ISS). Scores indicate decile rank relative to index or region. A decile score of 1 indicates lower governance risk, while a 10 indicates higher governance risk.